Infrared NF3 sensor

001-090J-101

LARK-1SM NF3 40PPM

40PPM

15s

±2 ppm @20 ℃

1 ppm/sec

Infrared NF3 sensor

001-080J-103

LARK-1M NF3 50000PPM

50000PPM

8s

± 100ppm ± 1%rel@ 20℃

20 ppm/sec

Infrared NF3 sensor

001-080J-D00

LARK-1MCT NF3 40PPM

40PPM

10s

± 3ppm @ 20℃

1 ppm/sec